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Oxidation Resistance Of TaSiN Diffusion Barriers For Stacked Capacitors

Author(s):
Letendu, F.
Hugon, M.C.
Agius, B.
Vickridge, I.
Ayguavives, F.
Kingon, A.I.
1 more
Publication title:
Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
655
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995659 [155899565X]
Language:
English
Call no.:
M23500/655
Type:
Conference Proceedings

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