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Microstructure and Mechanical Properties of Electroplated Cu Thin Films

Author(s):
Voinsky, A.A.
Vella, J.
Adhihetty, I.S.
Sarihan, V.
Mercado, L.
Yeung, B.H.
Gerberich, W.W.
2 more
Publication title:
Fundamentals of nanoindentation and nanotribology II : symposium held November 28-30, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
649
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Penn.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995598 [1558995595]
Language:
English
Call no.:
M23500/649
Type:
Conference Proceedings

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