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Determination of the Distribution of Ion Implantation Boron in Silicon

Author(s):
Publication title:
Ion beam synthesis and processing of advanced materials : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
647
Pub. Year:
2001
Pages:
5
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995574 [1558995579]
Language:
English
Call no.:
M23500/647
Type:
Conference Proceedings

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