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Optimization of the Carbonized Buffer Layer for the Growth of High Quality Single Crystal SiC on Si

Author(s):
Cloitre, T.
Moreaud, N.
Vicente, P.
Sadowski, M.
Moret, M.
Aulombard, R.L.
1 more
Publication title:
Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
640
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995505 [1558995501]
Language:
English
Call no.:
M23500/640
Type:
Conference Proceedings

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