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Size Reduction of Silicon Nanopillars by Photo-Electrochemical Etching

Author(s):
Publication title:
Microcrystalline and nanocrystalline semiconductors-2000 : symposium held November 27-30, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
638
Pub. Year:
2001
Pages:
5
Pub. info.:
Warrendale, PA.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995482 [155899548X]
Language:
English
Call no.:
M23500/638
Type:
Conference Proceedings

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