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Optical and Structural Characterization of Nanocrystalline Silicon Superlattices: Toward Nanoscale Silicon Metrology

Author(s):
Zollner, Stefan
Konkar, Atul
Liu, Ran
Yapa, Himansu
Dryer, Patricia F.
Neeley, Victoria A.
Xie, Qianghua
Grom, Galina F.
Zhu, Qingyuan
Krishnan, Rishikesh
Fauchet, Philippe M.
Tsybeskov, Leonid V.
7 more
Publication title:
Microcrystalline and nanocrystalline semiconductors-2000 : symposium held November 27-30, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
638
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, PA.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995482 [155899548X]
Language:
English
Call no.:
M23500/638
Type:
Conference Proceedings

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