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Fabrication and Characterization of 2-Dimensional AlGaAs Photonic Crystals With High Aspect Ratio Hole Patterns by Cl2 RIBE

Author(s):
Sugimoto, Yoshimasa
Carlsson, Niclas
Ikeda, Naoki
Asakawa, Kiyoshi
Kawai, Noriko
Inoue, Kuon
1 more
Publication title:
Microphotonics--materials, physics and applications : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
637
Pub. Year:
2001
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995475 [1558995471]
Language:
English
Call no.:
M23500/637
Type:
Conference Proceedings

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