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The Impact of Deposition Parameters on the Optical and Compositional Properties of Er Doped SRSO Thin Films Deposited by ECR-PECVD

Author(s):
Publication title:
Advanced devices and materials for laser remote sensing : symposium held March 29-31, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
883
Pub. Year:
2005
Page(from):
181
Page(to):
186
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998377 [1558998373]
Language:
English
Call no.:
M23500/883
Type:
Conference Proceedings

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