Blank Cover Image

Various Methods to Reduce Defect States in Tantalum Oxide Films for DRAM Applications

Author(s):
Lau, W.S.
Zhang, G.
Leong, L.L.
Han, Taejoon
Das, J.
Sandler, Nathan P.
Chu, P.K.
2 more
Publication title:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
864
Pub. Year:
2005
Page(from):
181
Page(to):
188
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998179 [1558998179]
Language:
English
Call no.:
M23500/864
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Efficient Detection of Oxygen Vacancy Double Donors in Capacitors with Ultra-Thin Ta2O5 Films for DRAM Applications by Zero-Bias Thermally Stimulated Current …

Lau, W.S., Zhong, L., Han, Taejoon, Sandler, Nathan P.

Materials Research Society
7 Conference Proceedings *DEPOSITION, ANNEALING, AND CHARACTERIZATION OF TANTALUM PENTOXIDE FILMS

Treichel, H., Mitwalsky, A., Tempel, G., Zorn, G., Kern, W., Sandler, N., Lane, A.P.

Materials Research Society
2 Conference Proceedings Tantalum Pentoxide for Advanced DRAM Applications

McKinley, K. A., Sandler, N. P.

MRS - Materials Research Society
8 Conference Proceedings Material and Electrical Characterization of Carbon-Doped Ta2O5 Films for Embedded DRAM Applications

Chu, Karen, Cho, Byeong-Ok, Chang, Jane P., Steigerwald, Mike L., Fleming, Robert M., Opila, Robert L., Lang, Dave V., …

Materials Research Society
3 Conference Proceedings A Radar for Ultra-thin High-k Dielectric Film: Zero-Bias Thermally Stimulated Current Spectroscopy

W. Lau, T. Han, C. L. Zhang, P. W. Qian, L. L. Leong, S. T. Che, P. Wong

Electrochemical Society
9 Conference Proceedings A New Single-Component Solid Oxide Fuel Cell

Worrell, W.L., Han, P., Uchimoto, Y., Davies, P.K.

Electrochemical Society
4 Conference Proceedings Two Step O2/N2O Plasma Annealing for the Reduction of Leakage Current in Amorphous Ta2O5 Films

Lau, W. S., Perera, M. T. Chandima, Han, T., Sandler, N. P., Tung, C. H., Sheng, T. T., Chu, P. K., Chong, T. C.

MRS - Materials Research Society
10 Conference Proceedings Evaluation of litho printability of DRAM contact hole patterns with various programmed defects

K. Seo, S. Lee, H. Kim, D. Hwang, S. Kim, G. Jeong, O. Han, C. Chen, D. Yee, E. Kim, K. Park, N. Kim, S. Choi, D. Kim, …

SPIE - The International Society of Optical Engineering
5 Conference Proceedings CHARACTERIZATION OF TANTALUM OXIDE THIN FILM AND ITS ELECTRODES FOR DRAM's CAPACITOR APPLICATION

Park, Jong-Wan, Jeon, Seok-Ryong, Lee, Jae-Suk, Lee, Jeong-Youb

MRS - Materials Research Society
11 Conference Proceedings Fluorescence probe for cervical examination during various reproductive states

Glassman,W.S., Liao,Q.-P., Shi,S.-Q., Goodrum,L., Olson,G., Martin,E., Saade,G., Garfield,R.E.

SPIE-The International Society for Optical Engineering
6 Technical Paper High Temperature Oxidation/Corrosion Performance of Various Materials for Exhaust System Applications.

Thakur, S.N., McMillen, J.R., Holly, M.L., Samal, P.K.

Society of Automotive Engineers
12 Conference Proceedings Tantalum oxide nanomers for optical applications

Braune,B., Muller,P., Schmidt,H.K.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12