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Fabrication of Nano-Crystalline Porous Silicon on Si Substrates by a Plasma Enhanced Hydrogenation

Author(s):
Abdi, Y.
Hashemi, P.
Karbassian, F.
Nayeri, F.D.
Behnam, A.
Mohajerzadeh, S.
Koohsorhki, J.
Robertson, M.D.
Arzi, E.
4 more
Publication title:
Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
862
Pub. Year:
2005
Page(from):
393
Page(to):
400
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558998155 [1558998152]
Language:
English
Call no.:
M23500/862
Type:
Conference Proceedings

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