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Leakage Currents through Thin Silicon Oxide Grown on Atomically Flat Silicon Surfaces

Author(s):
Publication title:
Kinetics-driven nanopatterning on surfaces : symposium held November 29-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
849
Pub. Year:
2005
Page(from):
115
Page(to):
120
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997974 [1558997970]
Language:
English
Call no.:
M23500/849
Type:
Conference Proceedings

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