Fabrication of Anatase TiO2 Thin Films Using Pulsed DC Magnetron Sputtering | 東京工業大学附属図書館文献データベース

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Fabrication of Anatase TiO2 Thin Films Using Pulsed DC Magnetron Sputtering

Author(s):

Al-Homoudi, Ibrahim A.

McCullen, Erik F.

Simon, K. Y. Ng

Publication title:

Solid-state chemistry of inorganic materials V : symposium held November 29-December 2, 2004, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

848

Pub. Year:

2005

Page(from):

165

Page(to):

170

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997967 [1558997962]

Language:

English

Call no.:

M23500/848

Type:

Conference Proceedings

Details

TDL ID:	ZA00014501
Series ID:	PA00000011
Conf. info. (Name):	Symposium on solid-state chemistry of inorganic materials
Conf. info. (Number):	5th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2004.11.29-2004.12.02

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