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Real-Time X-Ray Characterization of Sputter Deposition of Tantalum Films

Author(s):
Publication title:
Neutron and x-ray scattering as probes of multiscale phenomena : symposium held November 29-December 1, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
840
Pub. Year:
2005
Page(from):
113
Page(to):
118
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997882 [1558997881]
Language:
English
Call no.:
M23500/840
Type:
Conference Proceedings

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