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Excimer (XeCl) Laser Annealing of PbZr0.52Ti0.48O3 Thin Film at Low Temperature for TFT FRAM Application

Author(s):
Publication title:
Materials and processes for nonvolatile memories : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
830
Pub. Year:
2005
Page(from):
159
Page(to):
164
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997783 [1558997784]
Language:
English
Call no.:
M23500/830
Type:
Conference Proceedings

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