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Nickel Silicide Work Function Tuning Study In Metal-Gate CMOS Applications

Author(s):
Publication title:
Progress in compound semiconductor materials -- electronic and optoelectronic applications
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
829
Pub. Year:
2004
Page(from):
319
Page(to):
326
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997776 [1558997776]
Language:
English
Call no.:
M23500/829
Type:
Conference Proceedings

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