Performance of a MIS Type Pd-Cr/AlN/Si Hydrogen Sensor | 東京工業大学附属図書館文献データベース

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Performance of a MIS Type Pd-Cr/AlN/Si Hydrogen Sensor

Author(s):

Al-Homoudi, Ibrahim A.

McCullen, Erik F.

Auner, Gregory W.

Ng, K. Y. Simon

Publication title:

Semiconductor materials for sensing : symposium held November 29-December 2, 2004, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

828

Pub. Year:

2005

Page(from):

223

Page(to):

228

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997769 [1558997768]

Language:

English

Call no.:

M23500/828

Type:

Conference Proceedings

Details

TDL ID:	ZA00014482
Series ID:	PA00000011
Conf. info. (Name):	Symposium on semiconductor materials for sensing
Conf. info. (Number):	2004
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2004.11.29-2004.12.02

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