Blank Cover Image

Optimization of Mechanical Properties of Thin Free-Standing Metal Films for RF-MEMS

Author(s):
Publication title:
Nanoengineered assemblies and advanced micro/nanosystems : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
820
Pub. Year:
2004
Page(from):
177
Page(to):
182
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997707 [1558997709]
Language:
English
Call no.:
M23500/820
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High-Q Integrated RF Passives and RF-MEMS on Silicon

van Beek, Joost T. M., van Delden, Marc H. W. M., van Dijken, Auke, van Eerd, Patriek, Jansman, Andre B. M., Kemmeren, …

Materials Research Society
7 Conference Proceedings A Comparison of the Mechanical Properties of RF- and DC- Sputter-Deposited Cr Thin Films

M.W. Park, W.W. Lee, J.G. Lee, C.M. Lee

Trans Tech Publications
2 Conference Proceedings Mechanical properties and adhesion of PZT thin films for MEMS

Jungk, J. M., Crozier, B. T., Bandyopadhyay, A., Moody, N. R., Bahr, D. F.

MRS-Materials Research Society
8 Conference Proceedings High Performance RF FETs Using High-k Dielectrics on Wafer-Scale Quasi-Free-Standing Epitaxial Graphene

J.A. Robinson, M.J. Hollander, M. LaBella, K. Trumbull, M. Zhu

Trans Tech Publications
3 Conference Proceedings Mechanical Testing of Free-Standing Thin Films

Sharpe, W.N., Hemker, K.J.

Materials Research Society
9 Conference Proceedings Mechanical Properties of Ultrananocrystalline Diamond Thin Films for MEMS Applications

Espinosa, H.D., Peng, B., Kim, K.-H., Prorok, B.C., Moldovan, N., Xiao, X.C., Gerbi, J.E., Birrell, J., Auciello, O., …

Materials Research Society
4 Conference Proceedings Mechanical Testing of Free-Standing Thin Films

Sharpe, W.N. Jr.,, Hemker, K.J.

Materials Research Society
10 Conference Proceedings Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties

Sumant, A.V., Auciello, O., Krauss, A.R., Gruen, D.M., Ersoy, D., Tucek, J., Jayatissa, A., Stach, E., Moldovan, N., …

Materials Research Society
5 Conference Proceedings Free Standing and Applied Polyimide Films as Studied by Electrochemical Impedance Spectroscopy

Tan,E.K., Bellucci,F., Kloppers,M.J., Latanision,R.M.

Trans Tech Publications
11 Conference Proceedings Optical and Structural Characterization of Free-Standing Ultrahigh Porosity Silicon Thin Films

von Behren, J., Zacharias, M., Fauchet, P.M., Chimowitz, E.H.

Electrochemical Society
6 Conference Proceedings Film stress influence of bilayer metallization on the structure of RF MEMS switches

Strawser, R. E., Cortez, R., O'Keefe, M. J., Leedy, K. D., Ebel, J. L., Henderson, H. T.

MRS-Materials Research Society
12 Conference Proceedings Curvature Model for an Ion-Machined Free-Standing Thin Film MEMS Device

Johnson, H.T., Bierden, P., Bifano, T.G.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12