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Optimization of Film Stresses Utilized in Composite Piezoelectric Membrane Microgenerators

Author(s):
Kennedy, M.S.
Zosel, M.
Richards, C.D.
Richards, R.F.
Bahr, D.F.
Hipps, K.W.
Moody, N.R.
2 more
Publication title:
Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
795
Pub. Year:
2002
Page(from):
503
Page(to):
508
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997332 [1558997334]
Language:
English
Call no.:
M23500/795
Type:
Conference Proceedings

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