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High-Speed Processing With Cluster Ion Beams

Author(s):
Publication title:
Radiation effects and ion-beam processing of materials : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
792
Pub. Year:
2004
Page(from):
593
Page(to):
598
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558997301 [155899730X]
Language:
English
Call no.:
M23500/792
Type:
Conference Proceedings

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