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The Electrical Behavior of Pd/AlN/Semiconductor Thin Film Hydrogen Sensing Structures

Author(s):
Rimai, L.
Rahman, M.H.
McCullen, E.F.
Zhang, L.
Thakur, J.S.
Naik, R.
Newaz, G.M.
Ng, K.Y.S.
Baird, R.J.
Auner, G.W.
5 more
Publication title:
Silicon carbide 2004--materials, processing and devices : symposium held April 14-15, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
815
Pub. Year:
2004
Page(from):
305
Page(to):
310
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997653 [1558997652]
Language:
English
Call no.:
M23500/815
Type:
Conference Proceedings

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