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Impact of Hydrogen Plasma Treatment on Gettering by He Implantation-Induced Cavities in Silicon

Author(s):
Publication title:
Hydrogen in semiconductors : symposium held April 13-14, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
813
Pub. Year:
2004
Page(from):
55
Page(to):
60
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997639 [1558997636]
Language:
English
Call no.:
M23500/813
Type:
Conference Proceedings

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