Effects of Annealing on the Mechanical and Electrical Properties of DC Sputtered Tantalum Pentoxide (Ta2O5) Thin Films

Effects of Annealing on the Mechanical and Electrical Properties of DC Sputtered Tantalum Pentoxide (Ta2O5) Thin Films

Author(s):

Publication title:

Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

811

Pub. Year:

2004

Page(from):

63

Page(to):

68

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997615 [155899761X]

Language:

English

Call no.:

M23500/811

Type:

Conference Proceedings

Details

TDL ID:	ZA00014453
Series ID:	PA00000011
Conf. info. (Name):	Symposium on integration of advanced micro- and nanoelectronic devices
Conf. info. (Number):	2004
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2004.04.13-2004.04.16

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