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Amorphous Silicon Backplane With Polymer MEMS Structures for Electrophoretic Displays

Author(s):
Daniel, J.H.
Krusor, B.S.
Chopra, N.
Street, R.A.
Kazmaier, P.M.
Ready, S.E.
Ho, J.H.
2 more
Publication title:
Amorphous and nanocrystalline silicon science and technology - 2004 : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
808
Pub. Year:
2004
Page(from):
447
Page(to):
452
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558997585 [155899758X]
Language:
English
Call no.:
M23500/808
Type:
Conference Proceedings

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