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Hydrogen Injection in ETP Plasma Jet for Fast-Deposition of High-Quality a-Si:H

Author(s):
Publication title:
Amorphous and nanocrystalline silicon science and technology - 2004 : symposium held April 13-16, 2004, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
808
Pub. Year:
2004
Page(from):
359
Page(to):
364
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558997585 [155899758X]
Language:
English
Call no.:
M23500/808
Type:
Conference Proceedings

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