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Combinatorial Chemical Vapor Deposition of Metal Silicate Films Using Tri(t-butoxy) silanol and Anhydrous Metal Nitrates

Author(s):
Publication title:
Combinatorial and artificial intelligence methods in materials science II : symposium held December 1-4, Boston, Massachusetts, U.S.A
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
804
Pub. Year:
2004
Page(from):
15
Page(to):
20
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997424 [1558997423]
Language:
English
Call no.:
M23500/804
Type:
Conference Proceedings

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