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Characterization of Porous Silicate Low-k Films by Ellipsometric Porosimetry and Variable-Energy Positron Annihilation Spectroscopy

Author(s):
Ito, Kenji
Kobayashi, Yoshinori
Suzuki, Ryoichi
Ohdaira, Toshiyuki
Yu, Runsheng
Sato, Kiminori
Hirata, Kouichi
Togashi, Hisashi
Egami, Miki
Arao, Hiroki
Nakashima, Akira
Komatsu, Michio
7 more
Publication title:
Continuous nanophase and nanostructured materials : symposium held December 1-5, 2003, Boston, Masachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
788
Pub. Year:
2004
Page(from):
397
Page(to):
402
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997264 [1558997261]
Language:
English
Call no.:
M23500/788
Type:
Conference Proceedings

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