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High-Q Integrated RF Passives and RF-MEMS on Silicon

Author(s):
van Beek, Joost T. M.
van Delden, Marc H. W. M.
van Dijken, Auke
van Eerd, Patriek
Jansman, Andre B. M.
Kemmeren, Anton L. A. M.
Rijks, Theo G. S. M.
Steeneken, Peter G.
den Toonder, Jaap
Ulenaers, Mathieu J. E.
den Dekker, Amold
Lok, Pieter
Pulsford, Nick
van Straten, Freek
van Teeffelen, Lenhard
Coster, Jeroen de
Puers, Robert
12 more
Publication title:
Materials, integration and packaging issues for high-frequency devices
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
783
Pub. Year:
2004
Page(from):
97
Page(to):
108
Pages:
12
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997219 [1558997210]
Language:
English
Call no.:
M23500/783
Type:
Conference Proceedings

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