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A Novel CMP Process on Fixed Abrasive Pads for the Manufacturing of Highly Planar Thick Film SOI Substrates

Author(s):
Publication title:
Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
767
Pub. Year:
2003
Page(from):
133
Page(to):
140
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997042 [1558997040]
Language:
English
Call no.:
M23500/767
Type:
Conference Proceedings

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