Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP

Effect of Pad Surface Texture and Slurry Abrasive Concentration on Tribological and Kinetic Attributes of ILD CMP

Author(s):

Publication title:

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

767

Pub. Year:

2003

Page(from):

119

Page(to):

126

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558997042 [1558997040]

Language:

English

Call no.:

M23500/767

Type:

Conference Proceedings

Details

TDL ID:	ZA00014425
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical-mechanical planarization
Conf. info. (Number):	2003
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2003.04.22-2003.04.24

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