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Dual Damascene Process for Fat Wires in Copper/FSG Technology

Author(s):
Gambino, J.
Stamper, T.
Trombley, H.
Luce, S.
Allen, F.
Weinstein, C.
Reuter, B.
Dunbar, M.
Samek, V.
McLaughlin, P.
Kane, T.
6 more
Publication title:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
766
Pub. Year:
2003
Page(from):
71
Page(to):
76
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997035 [1558997032]
Language:
English
Call no.:
M23500/766
Type:
Conference Proceedings

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