Limiting Native Oxide Regrowth for High-k Gate Dielectrics
- Author(s):
- Publication title:
- CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 765
- Pub. Year:
- 2003
- Page(from):
- 85
- Page(to):
- 90
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558997028 [1558997024]
- Language:
- English
- Call no.:
- M23500/765
- Type:
- Conference Proceedings
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