Direct Electrical Characterization of Metal Induced Lateral Crystallization Regions by Spreading Resistance Probe Measurements

Direct Electrical Characterization of Metal Induced Lateral Crystallization Regions by Spreading Resistance Probe Measurements

Author(s):

Publication title:

Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

762

Pub. Year:

2003

Page(from):

705

Page(to):

710

Pages:

6

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996991 [1558996990]

Language:

English

Call no.:

M23500/762

Type:

Conference Proceedings

Details

TDL ID:	ZA00014420
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous and nanocrystalline silicon-based films
Conf. info. (Number):	2003
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2003.04.22-2003.04.25

Similar Items:

1 Conference Proceedings TCAD Modeling of Metal Induced Lateral Crystallization of Amorphous Silicon Agapov, Aleksey M., Kalinin, Valeri V., Myasnikov, Alexandre M., Poon, Vincent M.C., Vermeire, Bert Materials Research Society	7 Conference Proceedings Effect Of Ramp Annealing To Ni Induced Lateral Crystallization Of Amorphous Silicon Chan, M., Ko, P. K., Poon, M. C., Shivani, S. Materials Research Society
2 Conference Proceedings Super Poly-Si And Transistor Formed by Nickel-Induced-Lateral-Crystallization Cheng, C.F., Leung, T.C., Poon, M.C. Materials Research Society	8 Conference Proceedings New MEMS Technology Using Multi-Layer NILC Poly-Si and NiSi Films Cheung, W.M., Cheng, C.F., Poon, M.C., Qin, M., Yuen, C.Y., Chan, Mansun Materials Research Society
3 Conference Proceedings On Mechanism Of Nickel Diffusion During Metal Induced Lateral Crystallization Of Amorphous Silicon Myasnikov, A.M., Poon, M.C., Chan, P.C., Ng, K.L., Chan, M.S., Chan, W.Y., Singla, S., Yuen, C.Y. Materials Research Society	9 Conference Proceedings High Precision Physical Model For Nickel Milc Cheng, C.F., Cheung, W.M., Ng, K.L., Chan, P.J., Poon, M.C., Chan, Mansun, Kok, C.W. Materials Research Society
4 Conference Proceedings Grain Quality Enhancement of Nickel-Crystallized Polysilicon Film in Quantum-Wire-Like Structures Wang, Hongmei, Jagar, Singh, Zhan, N., Cheng, C.F., Poon, M.C., Chan, Mansun Materials Research Society	10 Conference Proceedings Statistical Modeling of Grain-Enhanced Polysilicon Thin-Film Transistor in Consideration of Grain Boundary Distribution Cheng, C.F., Poon, M.C., Kok, C.W., Chan, M. Materials Research Society
5 Conference Proceedings Effect Of Nickel In Large Grain Poly-Si Film Formed By Nickel Induced Lateral Crystallization And New Grain Enhancement Method Chan, M., Chan, W. Y., Han, P. G., Ko, P. K., Myasnikov, A. M., Poon, M. C., Yuen, C. Y. Materials Research Society	11 Conference Proceedings Effects of Process Conditions on the Performance of Large Grain Poly-Silicon On Insulator (LPSOI) MOSFET for Advanced CMOS Applications Shivani, S., Ng, K.L., Cheng, C.F., Poon, M.C., Chan, Mansum Materials Research Society
6 Conference Proceedings Effect of electric field on metal induced lateral crystallization of amorphous silicon Singla, Shivani, Poon, M. C., Chan, M., Qin, M., Chan, W. Y., Yuen, C. Y., Ko, P. K., Wong, H. MRS-Materials Research Society	12 Conference Proceedings Nanosecond Monitoring of Lateral Crystallization Dynamics Induced by ELA Y. Takami, T. Warabisako, M. Matsumura Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12