Blank Cover Image

Hot-Wire Chemical Vapor Deposition for Epitaxial Silicon Growth on Large-Grained Polycrystalline Silicon Templates

Author(s):
Publication title:
Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
762
Pub. Year:
2003
Page(from):
551
Page(to):
558
Pages:
8
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996991 [1558996990]
Language:
English
Call no.:
M23500/762
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition

Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A.

Materials Research Society
7 Conference Proceedings Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600℃: Epitaxial and Polycrystalline Silicon Films

Charles W. Teplin, Howard M. Branz, Kim M. Jones, Bobby To, Eugene Iwaniczko, Paul Stradins

Materials Research Society
2 Conference Proceedings Gas Phase and Surface Kinetic Processes in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition

Holt, J.K., Swiatek, M., Goodwin, D.G., Atwater, H.A., Muller, R.P., Goddard, W.A., III

Electrochemical Society
8 Conference Proceedings Hydrogenated Amorphous Silicon Germanium Alloys Grown by the Hot-Wire Chemical Vapor Deposition Technique

Nelson, Brent P., Xu, Yueqin, Williamson, D. L., Roedern, Bolko von, Mason, Alice, Heck, Stephan, Mahan, A. H., Schmitt, …

MRS - Materials Research Society
3 Conference Proceedings A Phase Diagram of Low Temperature Epitaxial Silicon Grown by Hot-Wire Chemical Vapor Deposition for Photovoltaic Devices

Richardson, Christine Esber, Kayes, Brendan M., Dicken, Matthew J., Atwater, Harry A.

Materials Research Society
9 Conference Proceedings Process Parameters for Poly-Silicon Deposition at a High Growth Rate (1-7nm/s) by Hot-Wire Chemical Vapor Deposition

Rath, J. K., Hardeman, A. J., Werf, C. H. M. van der, Veenendaal, P. A. T. T. van, Rusche, M. Y. S., Schropp, R. E. I.

Materials Research Society
4 Conference Proceedings Quantitative Modelling of Nucleation Kinetics in Experiments for Poly-Si Growth on SiO 2 by Hot-Wire Chemical Vapor Deposition

Swiatek, M, Holt, J.K., Atwater, H.A.

Electrochemical Society
10 Conference Proceedings Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass

Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins, Stefan Gall

Materials Research Society
5 Conference Proceedings Quality and Growth Rate of Hot-wire Chemical Vapor Deposition Epitaxial Si Layers

Charles W Teplin, Ina T. Martin, Kim M. Jones, David Young, Manuel J. Romero, Robert C. Reedy, Howard M. Branz, Paul …

Materials Research Society
11 Conference Proceedings Growth and Characterization of Polycrystalline Diamond Thin Films on Porous Silicon by Hot Filament Chemical Vapor Deposition

Mirzakuchaki, S., Charlson, E. J., Charlson, E. M., Stacy, T., Shahedipour, F., White, H. W.

MRS - Materials Research Society
6 Conference Proceedings Gas Phase And Surface Kinetic Processes In Hot-Wire Chemical Vapor Deposition

Atwater, H. A., Goodwin, D. G., Holt, J. K., Swiatek, M.

Materials Research Society
12 Conference Proceedings Comparative Study of Hot-Wire Chemical Vapor Deposition Onto (100) Si Near 600C: Epitaxial and Polycrystalline Silicon Films

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12