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Evolution of Crystallinity in Mixed-Phase (a+μc)-Si:H as Determined by Real Time Spectroscopic Ellipsometry

Author(s):
Ferlauto, A. S.
Ferreira, G. M.
Koval, R. J.
Pearce, J. M.
Wronski, C. R.
Collins, R. W.
Al-Jassim, M. M.
Jones, K. M.
3 more
Publication title:
Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
762
Pub. Year:
2003
Page(from):
539
Page(to):
544
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996991 [1558996990]
Language:
English
Call no.:
M23500/762
Type:
Conference Proceedings

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