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Microcrystalline Silicon Thin Film Growth by Electron Cyclotron Resonance Chemical Vapour Deposition at 80℃ for Plastic Application

Author(s):
Publication title:
Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
762
Pub. Year:
2003
Page(from):
533
Page(to):
538
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996991 [1558996990]
Language:
English
Call no.:
M23500/762
Type:
Conference Proceedings

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