Blank Cover Image

Performance of Thin-Film Silicon MEMS Resonators in Vacuum

Author(s):
Publication title:
Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
762
Pub. Year:
2003
Page(from):
151
Page(to):
156
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996991 [1558996990]
Language:
English
Call no.:
M23500/762
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates

Gaspar, J., Chu, V., Conde, J. P.

Materials Research Society
7 Conference Proceedings Reliability and Stability of Thin-Film Amorphous Silicon MEMS on Glass Substrates

P.M. Sousa, V. Chu, J.P. Conde

Materials Research Society
2 Conference Proceedings Thin Film Microelectromechanical Systems

Chu, V., Gaspar, J., Conde, J.P.

Materials Research Society
8 Conference Proceedings Performance of Thin-Film Silicon MEMS on Flexible Plastic Substrates

Samadhan Patil, Virginia Chu, Joao Pedro Conde

Materials Research Society
3 Conference Proceedings Thin-Film Electrostatic Actuators on Flexible Plastic Substrates

Gaspar, J., Chu, V., Conde, J. P.

Materials Research Society
9 Conference Proceedings Mechanical Properties and Reliability of Amorphous vs. Polycrystalline Silicon Thin Films

Joao Gaspar, Oliver Paul, Virginia Chu, Joao Pedro Conde

Materials Research Society
4 Conference Proceedings MEMS Microresonators Based on Nanocrystalline Silicon

Gaspar, J., Adrega, T., Chu, V., Conde, J.P.

Materials Research Society
10 Conference Proceedings Integrated Magnetic Sensing Of Electrostatically Actuated Thin Film Microbridges

Gaspar, J., Li, Haohua, Freitas, P.P., Chu, V., Conde, J.P.

Materials Research Society
5 Conference Proceedings Thin Film Silicon Microbridges for DNA Detection.

Adrega, T., Gaspar, J., Fixe, F., Chu, V., Prazeres, D.M.F., Conde, J.P.

Materials Research Society
11 Conference Proceedings Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures

Gaspar, J., Boucinha, M., Chu, V., Conde, J.P.

Materials Research Society
6 Conference Proceedings Thin Film Amorphous Silicon Bulk-Mode Disk Resonators Fabricated on Glass Substrates

A. Gualdino, V. Chu, J.P. Conde

Materials Research Society
12 Conference Proceedings Performance of Thin-film a-Si:H Microresonators in Dissipative Media

Teresa Adrega, D. M. F. Prazeres, V. Chu, J. P. Conde

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12