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Optical Properties of Anatase, Rutile and Amorphous Phases of TiO2 Thin Films Grown at Room Temperature by RF Magnetron Sputtering

Author(s):
Publication title:
Solid-State Chemistry of Inorganic Materials IV : symposium held December 2-6, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
755
Pub. Year:
2003
Page(from):
413
Page(to):
418
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996922 [1558996923]
Language:
English
Call no.:
M23500/755
Type:
Conference Proceedings

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