Metalorganic Chemical Vapor Deposition of Aluminum Oxide on Silicon Nitride

Metalorganic Chemical Vapor Deposition of Aluminum Oxide on Silicon Nitride

Author(s):

Publication title:

Structure-property relationships of Oxide surfaces and interfaces II : symposium held December 2-3, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

751

Pub. Year:

2003

Page(from):

133

Page(to):

138

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996885 [1558996885]

Language:

English

Call no.:

M23500/751

Type:

Conference Proceedings

Details

TDL ID:	ZA00014411
Series ID:	PA00000011
Conf. info. (Name):	Symposium on structure-property relationships of oxide surfaces and interfaces
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.03

Similar Items:

1 Conference Proceedings Process-Structure Relationships of Nitrided Oxides and Oxynitrides Dasgupta, Anindya, Takoudis, Christos G. Materials Research Society	7 Conference Proceedings 206e. Metal Organic Chemical Vapor Deposition of Titanium Oxynitride Films Using Tetrakis(Diethylamino)Titanium Xuemei Song, Christos G. Takoudis American Institute of Chemical Engineers
2 Conference Proceedings Low Temperature Si0.85Ge0.15 Oxynitridation in Wet-Nitric Oxide Ambient Dasgupta, Anindya, Takoudis, Christos G. Materials Research Society	8 Conference Proceedings SiO2 Formation at the Aluminum Oxide/Si(100) Interface Roy Chowdhuri, A., Takoudis, C. G., Klie, R. F., Browning, N. D. Materials Research Society
3 Conference Proceedings On the Argon Annealing-Based Improvements of the Properties of Ultra-Thin Oxynitrides Nitrides With NH3 Dasgupta, Anindya, Takoudis, Christos G., Martel, Greg Materials Research Society	9 Conference Proceedings Chemical Vapor Deposition and Properties of Amorphous Aluminum Oxide Films Gordon, Roy G., Kramer, Keith, Liu, Xinye MRS - Materials Research Society
4 Conference Proceedings Low Temperature Oxynitridation Of SiGe In NO/N2O Ambients Dasgupta, Anindya, Takoudis, Christos G. Materials Research Society	10 Conference Proceedings Peudeo-EpitaxyTM process for Aluminum Gallium Nitride Thin Films on Silicon Carbide Substrates via Metalorganic Chemical Vapor Deposition Gehrke, T., Linthicum, K. J., Rajagopal, P., Preble, E. A., Carlson, E. P., Robin, B. M., Davis, R. F. Trans Tech Publications
5 Conference Proceedings (533d) Low Pressure Metalorganic Chemical Vapor Deposition of Nickel Ferrite Thin Films On Ferroelectric Substrates Yi Yang, Manish Singh, Christos Takoudis American Institute of Chemical Engineers	11 Conference Proceedings (213c) Chemical Vapor Deposition Route to Multifunctional Multiferroics Manish Singh, Yi Yang, Christos Takoudis American Institute of Chemical Engineers
6 Conference Proceedings Experimental and Theoretical Studies of the Si(100)/SiO2 Interface Formed by Wet and Dry Oxidation Roy Chowdhuri, A., Jin, Dong-Un, Takoudis, C. G. Materials Research Society	12 Conference Proceedings In-Situ Infrared Emission Spectroscopy During Silicon Chemical Vapor Deposition Takoudis. C.G., Panezyk, C. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12