Fracture Behavior of Thin Film PZT on Silicon MEMS and Membranes

Fracture Behavior of Thin Film PZT on Silicon MEMS and Membranes

Author(s):

Publication title:

Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

750

Pub. Year:

2003

Page(from):

605

Page(to):

610

Pages:

6

Pub. info.:

Warrendale, Penn: Materials Research Society

ISSN:

02729172

ISBN:

9781558996878 [1558996877]

Language:

English

Call no.:

M23500/750

Type:

Conference Proceedings

Details

TDL ID:	ZA00014410
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface engineering
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.05

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