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Metrology Issues in Cu-Low-k Chemical Mechanical Planarization

Author(s):
Publication title:
Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
750
Pub. Year:
2003
Page(from):
561
Page(to):
566
Pages:
6
Pub. info.:
Warrendale, Penn: Materials Research Society
ISSN:
02729172
ISBN:
9781558996878 [1558996877]
Language:
English
Call no.:
M23500/750
Type:
Conference Proceedings

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