Nanoscale Control of Friction and Chemistry on Silicon Surfaces

Nanoscale Control of Friction and Chemistry on Silicon Surfaces

Author(s):

Baluch, Andrew S.

Publication title:

Surface engineering 2002 - synthesis, characterization and applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

750

Pub. Year:

2003

Page(from):

539

Page(to):

548

Pages:

10

Pub. info.:

Warrendale, Penn: Materials Research Society

ISSN:

02729172

ISBN:

9781558996878 [1558996877]

Language:

English

Call no.:

M23500/750

Type:

Conference Proceedings

Details

TDL ID:	ZA00014410
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface engineering
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.05

Similar Items:

1 Conference Proceedings Fundamental Aspects of Friction and wear Contacts in W <100>Surfaces Gerberich, William W., Tymiak, Natalia I., Kramer, Donald E. Materials Research Society	7 Conference Proceedings 189aa. Synthesis of Nanoscale Cobalt-Iron Spinel Oxides Via Atomic Layer Deposition and Their Applications for Solar Thermochemical Water Splitting Jonathan R. Scheffe, Nathan P. Siegel, Mark D. Allendorf, Alan W. Weimer American Institute of Chemical Engineers
2 Conference Proceedings (276a) Monodisperse Carbon Nanotubes Produced Using Iterative Orthogonal Density Gradient Ultracentrifugation Alexander A. Green, Mark C. Hersam American Institute of Chemical Engineers	8 Conference Proceedings Heterosupramolecular chemistry: the self-assembly and self-organization of nanoscale devices and materials in solution Cusack, Lucy, Rao, S. Nagaraja, Fitzmaurice, Donald American Chemical Society
3 Conference Proceedings 486d. Molecular Simulation Studies Of Nanoscale Friction Between Phosphorylcholine Self-Assembled Monolayer Surfaces: Correlation Between Surface Hydration And … Yi He, Shengfu Chen, Jason C. Hower, Matthew Bernards, Shaoyi Jiang American Institute of Chemical Engineers	9 Conference Proceedings Spatially controlled surface chemistry by excimer laser ablation of thin films Thissen, H., Hayes, J.P., Muir, B.W., Atkin, M., Harvey, E.C. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Nanoscale Lubrication and Friction Control Gao, J., Luedtke, W. D., Landman, U. Kluwer Academic Publishers	10 Conference Proceedings CHEMISTRY OF NITROGEN-SILANE PLASMAS Smith, Donald L., Alimonda Andrew S., Von Preissing, Frederick J. Materials Research Society
5 Conference Proceedings PLASMA CHEMISTRY CONTROL OF SILICON NITRIDE DEPOSITION Smith, D.L., Alimonda, A.S., Chen, C-C., Jackson, W., Wacker, B. Materials Research Society	11 Conference Proceedings Mathematically describing the target contour in silicon such that model-based OPC can best realize design intent Cork, C.M., Balasingam, P., Sandvik, S., Kielhorn, B., Rieger, M.L. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Surface Chemistry of CVD Diamond: Linking the Nanoscale and Mesoscale Modelling Hierarchies Oleinik, I. I., Pettifor, D. G., Sutton, A. P., Battaile, C. C., Srolovitz, D. J., Butler, J. E. MRS - Materials Research Society	12 Conference Proceedings CHEMISTRY OF SiO2 PLASMA DEPOSITION Smith, Donald L., Alimonda, Andrew S., Chuang, Tzu-Chin Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12