Novel Resistance Reduction and Phase Changes of Contacts to n-Type InP by Rapid Thermal Annealing

Novel Resistance Reduction and Phase Changes of Contacts to n-Type InP by Rapid Thermal Annealing

Author(s):

Huang, J.S.

Publication title:

Progress in semiconductors II : electronic and optoelectronic applications : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

744

Pub. Year:

2003

Page(from):

337

Page(to):

342

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996816 [1558996818]

Language:

English

Call no.:

M23500/744

Type:

Conference Proceedings

Details

TDL ID:	ZA00014404
Series ID:	PA00000011
Conf. info. (Name):	Symposium on progress in semiconductors
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.05

Similar Items:

1 Conference Proceedings RAPID THERMAL ANNEALING OF As IN Si Shih, N. T., Huang, F. S., Chu, C. H., Chen, W. S. Materials Research Society	7 Conference Proceedings Novel Thermally Stable Contacts to GaN L. Stafford, R. Khanna, L. Voss, S. J. Pearton, F. Ren, T. J. Anderson, A. Dabiran, A. Osinsky Electrochemical Society
2 Conference Proceedings Ohmic contacts to GaN with rapid thermal annealing Chi,L.W., Lam,K.T., Kao,Y.K., Juang,F.-S., Tasi,Y.S., Su,Y.K., Chang,S.-J., Chen,C.C., Sheu,J.K. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Non-Alloyed Ohmic Contacts on n-Type InP with Nitridation of Patterned InP Surface Ren, F., Pearton, S. J., Lothian, J.R., Chu, S.N.G., Chu, W.K., Wilson, R.G., Abernathy, C.R., Pei, S. Electrochemical Society
3 Conference Proceedings REMOVAL OF POLYMERIC/SILICATE RESIDUES AND REDUCTION OF CONTACT RESISTANCE FOR INTER-METAL VIA HOLES BY VAPOR PHASE HF CLEANING Tong, J.K., Martin, J.S., Rogers, T.C., Syverson, D.J. Electrochemical Society	9 Conference Proceedings LUMINESCENCE OF Si-IMPLANTED InP AFTER RAPID THERMAL ANNEALING Kirillov, D., Merz, J. L. Materials Research Society
4 Conference Proceedings SUSCEPTOR AND PROXIMITY RAPID THERMAL ANNEALING OF InP Katz, A., Pearton, S. J., Geva, M. Materials Research Society	10 Conference Proceedings W, WSix and Ti/Al Low Resistance Ohmic Contacts to InGaN, InN and InAlN Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., Zolper, J. C., Lovejoy, M. L., Baca, A. … MRS - Materials Research Society
5 Conference Proceedings Phase Formation at Rapid Thermal Annealing of Nickel Contacts on C-Face n-Type 4H-SiC Ferrero, S., Albonico, A., Meotto, U. M., Rambola, G., Porro, S., Giorgis, F., Perrone, D., Scaltrito, L., Bontempi, E., … Trans Tech Publications	11 Conference Proceedings RAPID THERMAL ANNEALING OF SHALLOW, DIFFUSED CONTACT REGIONS IN GaAs Kepler, N.J., Cheung, N.W., Chu, P.K. Materials Research Society
6 Conference Proceedings Rapid Thermal Processing of III-Nitrides Hong, J., Lee, J. W., Vartuli, C. B., MacKenzie, J. D., Donovan, S. M., Abernathy, C. R., Crockett, R. V., Pearton, S. … MRS - Materials Research Society	12 Conference Proceedings Ti/Al and Cr/Al Ohmic Contacts to n-Type GaN Formed by Furnace Annealing Papanicolaou,N.A., Edwards,A., Rao,M.V., Mittereder,J.A., Anderson,W.T. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12