Blank Cover Image

Growth of Columnar SiC on Patterned Si Substrates by CVD

Author(s):
Publication title:
Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
742
Pub. Year:
2003
Page(from):
59
Page(to):
66
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996793 [1558996796]
Language:
English
Call no.:
M23500/742
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications
7 Conference Proceedings Gaseous Etching Effects on Homoepitaxial Growth of SiC on Hemispherical Substrates Using CVD

Nishino, S., Masuda, Y., Ohshima, S., Jacob, C.

Trans Tech Publications
2 Conference Proceedings Selective Epitaxial Growth of Pyramidal 3C-SiC on Patterned Si Substrate

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications
8 Conference Proceedings Low Temperature Lateral Epitaxial Growth Of Silicon Carbide On Silicon

Jacob, Chacko, Chung, Juyong, Hong, Moon-Hi, Pirouz, Pirouz, Nishino, Shigehiro

Materials Research Society
3 Conference Proceedings Channel Epitaxy of 3C-SiC on Si Substrates by CVD

Nishino, S., Okui, Y., Jacob, C., Ohshima, S.

Materials Research Society
9 Conference Proceedings Pendeo Epitaxial Growth of 3C-SiC on Si Substrates

Shoji, A., Okui, Y., Nishiguchi, T., Ohshima, S., Nishino, S.

Trans Tech Publications
4 Conference Proceedings Control of Pendeo Epitaxial Growth of 3C-SiC on Silicon Substrate

Okui, Y., Jacob, C., Ohshima, S., Nishino, S.

Trans Tech Publications
10 Conference Proceedings Epitaxial Growth of 3C-SiC on T-Shape Columnar Si Substrates

Nishino, S., Shoji, A., Nishiguchi, T., Ohshima, S.

Materials Research Society
5 Conference Proceedings Epitaxial Growth of SiC on AIN/Spphire Using Hexamethyldisilane by MOVPE

Teker, Kasif, Lee, Ki Hoon, Jacob, Chacko, Nishino, Shigehiro, Pirouz, Pirouz

Materials Research Society
11 Conference Proceedings Low Temperature Selective and Lateral Epitaxial Growth of Silicon Carbide on Patterned Silicon Substrates

Jacob, C., Pirouz, P., Nishino, S.

Trans Tech Publications
6 Conference Proceedings Surface Morphology of 6H-SiC on Various a-Plane Using Si2Cl6+C3H8+H2 by Chemical Vapor Deposition

Nishino, Shigehiro, Masuda, Yasuichi, Ohshima, Satoru, Jacob, Chacko

Materials Research Society
12 Conference Proceedings Deep Level Study In Epitaxial 4H-SiC Grown On Substrates Inclined Toward <1Bar100>

Kato, Masashi, Ichimura, Masaya, Arai, Eisuke, Nishino, Shigehiro

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12