Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based on Photonic Crystals

Modeling Combined Thermal, Electrical, Optical and Mechanical Response for MEMS Spectroscopic Gas Sensor Based on Photonic Crystals

Author(s):

Greenwald, Anton C.

Publication title:

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

741

Pub. Year:

2003

Page(from):

267

Page(to):

272

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996786 [1558996788]

Language:

English

Call no.:

M23500/741

Type:

Conference Proceedings

Details

TDL ID:	ZA00014401
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.04

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