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Nonuniformity in Selective Anodization of Silicon and Its Application to Micro-Tip Fabrication

Author(s):
Publication title:
Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
741
Pub. Year:
2003
Page(from):
105
Page(to):
110
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996786 [1558996788]
Language:
English
Call no.:
M23500/741
Type:
Conference Proceedings

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