Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators | 東京工業大学附属図書館文献データベース

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Design and Performance of a Microengine Realized With Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

Author(s):

Kolesar, Edward S.

Ruff, Matthew D.

Odom, William E.

Jayachandran, Joseph A.

McAllister, Justin B.

Howard, Jeffery T.

Allen, Peter B.

Wilken, Josh M.

Boydston, Noah C.

Bosch, Jorge E.

Wilks, Richard J.

Publication title:

Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

741

Pub. Year:

2003

Page(from):

93

Page(to):

98

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996786 [1558996788]

Language:

English

Call no.:

M23500/741

Type:

Conference Proceedings

Details

TDL ID:	ZA00014401
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines
Conf. info. (Number):	2002
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2002.12.02-2002.12.04

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