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Fabrication of Flat RF MEMS Switch Membrane by Minimizing of Stress Gradients in the Au Membrane Structure

Author(s):
Kim, Jong-Seok
Song, Hoon
Cho, Jin Woo
Lee, Eun Sung
Park, Sun Hee
Lee, Mun Chul
Shim, Dong Hwa
Song, In Sang
Kim, Jung Woo
Kang, Seok Jin
Song, Ki Moo
6 more
Publication title:
Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
741
Pub. Year:
2003
Page(from):
87
Page(to):
92
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996786 [1558996788]
Language:
English
Call no.:
M23500/741
Type:
Conference Proceedings

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