Blank Cover Image

STM TIPS FABRICATION FOR CRITICAL DIMENSION MEASUREMENTS

Author(s):
Publication title:
Scanning probe microscopy : characterization, nanofabrication and device application of functional materials
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
186
Pub. Year:
2005
Page(from):
357
Page(to):
362
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402030178 [1402030177]
Language:
English
Call no.:
N17050/186
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Stability of glass probe tips for critical dimension measurement

Griffith,J.E., Miller,G.L., Hopkins,L.C., Bryson,C.E., Snyder,E.J., Plombon,J.J., Vasilyev,L.A., Bindell,J.B.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of SF6 Plasmas by RF Electrical Measurements

Pisani, M.B., Verdonek, P.B.

Electrochemical Society
2 Conference Proceedings Interferometric calibration of microdisplacement actuators

Picotto, G. B.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings CALIPSO correlative measurements at Napoli EARLINET station

X. Wang, M. Armenante, G. Frontoso, G. Pisani, N. Spinelli

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Atomic force microscopy with carbon nanotube tip for critical dimension measurement

Park, B.C., Jung, K.Y., Song, W.Y., O, B.-H., Eom, T.B.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Measurement of Through-Thickness Residual Stress in Primary Piping of Girth Welded Joint

M. Mochizuki, S. Okano, G.B. An, M. Toyoda

Trans Tech Publications
4 Conference Proceedings Nanostructured thin films: a critical review (Critical Review Lecture)

Smith, G.B.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Critical dimension AFM tip characterization and image reconstruction applied to the 45-nm node [6152-107]

Dahlen, G., Osborn, M., Liu, H. C., Jain, R., Foreman, W., Osborne, J. R.

SPIE - The International Society of Optical Engineering
5 Conference Proceedings Precision carbon nanotube tip for critical dimension measurement with atomic force microscope

Wies, C., Lebert, R., Jagle, B., Juschkin, L., Sobel, F., Seitz, H., Walter, R., Laubis, C., Schoize, F., Biel, W., …

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Isotropic Residual Stresses in Thermosetting Resins: A New Instrument for Direct Measurement (1003)

Iza,M., Simon,S.L., McKenna,G.B.

Society of Plastic Engineers.
6 Conference Proceedings A sampling wattmeter for noise power measurements

Callegaro, L., Pisani, M.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings The Influence of the Finite Step Time on the Measurement of the Viscoelastic Response Functions

Flory, A., McKenna, G.B.

Society of Plastics Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12