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CVD diamond films for SOI technologies

Author(s):
Ralchenko, V.
Galkina, T.
Klokov, A.
Sharkov, A.
Chernook, S.
Martovitsly, V.
1 more
Publication title:
Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
Title of ser.:
NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.:
185
Pub. Year:
2005
Page(from):
77
Page(to):
84
Pages:
8
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISBN:
9781402030116 [1402030118]
Language:
English
Call no.:
N17050/185
Type:
Conference Proceedings

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