Smart Cut Technology: the path for advanced SOI substrates
- Author(s):
- Publication title:
- Science and technology of semiconductor-on-insulator structures and devices operating in a harsh environment
- Title of ser.:
- NATO science series. Series 2, Mathematics, physics and chemistry
- Ser. no.:
- 185
- Pub. Year:
- 2005
- Page(from):
- 39
- Page(to):
- 52
- Pages:
- 14
- Pub. info.:
- Dordrecht: Kluwer Academic Publishers
- ISBN:
- 9781402030116 [1402030118]
- Language:
- English
- Call no.:
- N17050/185
- Type:
- Conference Proceedings
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